发明名称 |
SUBSTRATE WITH PLANARIZING COATING AND METHOD OF MAKING SAME |
摘要 |
<p>A substrate coated with a composition so as to form a planarizing layer defining a planarized surface of the substrate having an RMS surface roughness equal to or less than about 1 nm. The composition comprises in polymerized form at least one or more acrylate containing monomers, oligomers, or resins and a plurality of inorganic oxide particles that are smaller than or equal to 20 nm in size.</p> |
申请公布号 |
EP2382054(A4) |
申请公布日期 |
2013.04.03 |
申请号 |
EP20090837068 |
申请日期 |
2009.12.28 |
申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
WOODY, JOSEPH W. V;KOLB, WILLIAM B.;KOLB, BRANT U. |
分类号 |
B05D5/00;B82B3/00;H01L51/00 |
主分类号 |
B05D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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