发明名称 SEMICONDUCTOR CHIP TESTING METHOD AND SEMICONDUCTOR CHIP TESTING DEVICE
摘要 <p>PURPOSE: A semiconductor chip testing method and a semiconductor chip testing apparatus are provided to determine only the semiconductor chip with high reliability by including a determination updating unit, a failure rate calculating unit, and a determination unit. CONSTITUTION: A determination unit(1) determines an electrical property of each chip on a wafer. A cassette receiving unit(2) receives a semiconductor wafer group which is determined by the determination unit in a cassette. A marking unit(3) marks information to display a failure of a chip. A failure rate calculating unit(4) calculates a failure rate. A failure rate determining unit(5) outputs the failure rate determination result to a determination updating unit(6) and an alarm unit(7). The alarm unit transmits an alarm to the outside if the failure rate of a wafer address is a critical value or more. [Reference numerals] (1) Determination unit; (2) Cassette receiving unit; (3) Marking unit; (4) Failure rate calculating unit; (5) Failure rate determining unit; (6) Determination updating unit; (7) Alarm unit;</p>
申请公布号 KR20130033303(A) 申请公布日期 2013.04.03
申请号 KR20120102636 申请日期 2012.09.17
申请人 MITSUBISHI ELECTRIC CORPORATION 发明人 HAMAGUCHI TAKUYA;TSUNODA TETSUJIRO;KANAZAWA SHOKO
分类号 H01L21/66;G01R31/02;G01R31/26 主分类号 H01L21/66
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