CORE-SHELL NANO-STRUCTURE, METHOD OF FABRICATING THE SAME AND LITHIUM ION BATTERY

摘要

PURPOSE: A nanostructure is provided to improve electron conductivity and structural stability and to obtain high capacity and high retention for the negative electrode of a lithium secondary battery. CONSTITUTION: A nanostructure consists of a core/shell structure that a core is made of a metal silicide and is covered with silicon. A manufacturing method of the nanostructure comprises a step of forming a metal thin film on a substrate(11); a step of forming an oxide film by oxidizing a part of the metal thin film; a step of injecting silicon-containing reaction gas into an oxide film and forming a metal silicide nanostructure(14); a step of injecting the silicon-containing reaction gas into the metal silicide nanostructure and forming silicon on the surface of the metal silicide nanostructure.