发明名称 |
Piezoelectric actuator unit having a stress relieving layer and method for manufacturing the same |
摘要 |
A piezoelectric actuator unit which undergoes less change in the amount of displacement and shows high durability in continuous operation under a high voltage and a high pressure over a long period of time is provided. The piezoelectric actuator unit including a multi-layer piezoelectric element having piezoelectric layers and metal layers with the piezoelectric layers and the metal layers being stacked one on another, and a case which houses the multi-layer piezoelectric element, wherein at least one of the plurality of metal layers is stress relieving layer which consists of a plurality of partial metal layers that are scattered throughout the entire region between two piezoelectric layers which adjoin the partial metal layers in the direction of stacking, and voids, and a peel-off section is formed at least in a part of the interface between the stress relieving layer and the piezoelectric layer that adjoins therewith. |
申请公布号 |
US8410663(B2) |
申请公布日期 |
2013.04.02 |
申请号 |
US20090446175 |
申请日期 |
2009.09.08 |
申请人 |
SAKAMOTO TAKAMI;INAGAKI MASAHIRO;KASTL HARALD-JOHANNES;SCHUH CARSTEN;DOELLGAST BERNHARD;OCHI ATSUSHI;KYOCERA CORPORATION;CONTINENTAL AUTOMOTIVE GMBH |
发明人 |
SAKAMOTO TAKAMI;INAGAKI MASAHIRO;KASTL HARALD-JOHANNES;SCHUH CARSTEN;DOELLGAST BERNHARD;OCHI ATSUSHI |
分类号 |
H01L41/083 |
主分类号 |
H01L41/083 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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