发明名称 |
Liquid metal ion source, secondary ion mass spectrometer, secondary ion mass spectrometric analysis method and use thereof |
摘要 |
A mass spectrometric method according to the Gentle SIMS (G-SIMS) method uses a liquid metal ion source which contains, on the one hand, a first metal with an atomic weight≧190 U and, on the other hand, another metal with an atomic weight≰90 U. One of the two types of ions are filtered out alternately from the primary ion beam and directed onto the target as a mass-pure primary ion beam.
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申请公布号 |
US8410425(B2) |
申请公布日期 |
2013.04.02 |
申请号 |
US20080739993 |
申请日期 |
2008.10.16 |
申请人 |
KOLLMER FELIX;HOERSTER PETER;DUETTING ANDREAS;ION-TOF TECHNOLOGIES GMBH |
发明人 |
KOLLMER FELIX;HOERSTER PETER;DUETTING ANDREAS |
分类号 |
H01J49/26;H01J49/10;H01J49/40;H01J49/42 |
主分类号 |
H01J49/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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