| 摘要 |
PURPOSE: An atmospheric pressure plasma electrode structure for reducing the generation of particles and improving a cleansing effect is provided to reduce the arrival time of cleansing-affecting active particles at a substance to be processed by increasing the speed of gas flow and to increase the amount of active particles on a surface, thereby improving the cleansing effect. CONSTITUTION: An atmospheric pressure plasma electrode structure is separated into a particle generation area by unnecessary parasitic discharges and a plasma generation area where process gases flow in and process a substance to be processed. The particle generation area by unnecessary parasitic discharges is composed of a metal electrode(210) applied with a high voltage and a dielectric inside(220). The plasma generation area is composed of a ground plate(310) for filtering out electrons, ions, and active particles, and a plasma forming space(320).
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