发明名称 Semiconductor package with a metal post and manufacturing method thereof
摘要 Disclosed are a semiconductor package and a manufacturing method thereof. The semiconductor package can include a semiconductor substrate, having one surface on which a conductive pad is formed; an insulating layer, being formed on one surface of the semiconductor substrate; a metal post, penetrating through the conductive pad, the semiconductor substrate, and the insulating layer; and an outer-layer circuit, being electrically connected to the metal post. With the present invention, it can become unnecessary to form an additional via for electrically connecting both surfaces of the semiconductor substrate, thereby simplifying the manufacturing process, reducing the manufacturing cost, and improving the coupling reliability.
申请公布号 US8409981(B2) 申请公布日期 2013.04.02
申请号 US201213409737 申请日期 2012.03.01
申请人 KIM WOON-CHUN;YIM SOON-GYU;KWEON YOUNG-DO;LEE JAE-KWANG;SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 KIM WOON-CHUN;YIM SOON-GYU;KWEON YOUNG-DO;LEE JAE-KWANG
分类号 H01L21/4763 主分类号 H01L21/4763
代理机构 代理人
主权项
地址