| 摘要 |
Between an upper substrate 10 and a lower substrate 20 parallel to the XY plane, a first columnar member P1 and a second columnar member P2 are disposed. The upper end of each columnar member P1 or P2 is connected to the upper substrate 10 via an upper film portion 11 or 12, and the lower end is connected to the lower substrate 20 via a conductive lower film portion 21 or 22. The columnar members P1 and P2 are inclined mutually opposite with respect to vertical reference axes R1 and R2. When a rightward force +Fx is applied to the upper substrate 10 and the upper substrate 10 slides rightward, the columnar member P1 incline in a laying-down direction and the lower film portion 21 is deformed upward, and the columnar member P2 inclines in a rising direction and the lower film portion 22 is deformed downward. Based on a difference in capacitance value between a capacitance element consisting of the lower film portion 21 and an electrode E5 and a capacitance element consisting of the lower film portion 22 and an electrode E6, the force Fx in the X-axis direction is detected. By summing the capacitance values, a force Fz in the Z-axis direction can also be detected. |
