WAFER TEST APPARATUS

摘要

PURPOSE: A wafer test apparatus is provided to reduce the generation rate of carbon dioxide by using a control part which changeably controls the amount of dry air supplied to a probe. CONSTITUTION: A temperature control part(120) compares a fist dew point with a second dew point in a probe(200). A probe electrically tests the semiconductor chip of a wafer and the first dew point. A dry air control part(140) controls the amount of dry air supplied to the probe according to the comparison result of the temperature control part. The first dew point is compared with the second dew point in real time. [Reference numerals] (120) Temperature control part; (140) Dry air control part; (500) Dew point meter unit; (7a,7b) Dry air;