发明名称 |
Differential FET structures for electrical monitoring of overlay |
摘要 |
A method and apparatus for determining overlay includes an array of electronic devices having structures formed in a plurality of layers and such that a device on a first end of the array includes an offset from a position of a device on a second end of the array. A measurement device is configured to measure electrical characteristics of the devices in the array to determine a transition position between the electrical characteristics. A comparison device is configured to determine an overlay between the layers based on a device associated with the transition position. |
申请公布号 |
US8409882(B2) |
申请公布日期 |
2013.04.02 |
申请号 |
US20090617901 |
申请日期 |
2009.11.13 |
申请人 |
ACAR EMRAH;BANSAL ADITYA;SINGHEE AMITH;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ACAR EMRAH;BANSAL ADITYA;SINGHEE AMITH |
分类号 |
H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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