发明名称 |
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE |
摘要 |
PURPOSE: A method for manufacturing a semiconductor device and the semiconductor device are provided to reduce the length of a channel by using an oxide semiconductor and to secure the miniaturization of a transistor. CONSTITUTION: A gate electrode layer(401) is formed on a semiconductor layer(403). An insulating layer(407) includes a first aperture and a second aperture. A source electrode layer(405a) and a drain electrode layer(405b) are filled in the first aperture and the second aperture, respectively. The source electrode layer and the drain electrode layer are electrically connected to the semiconductor layer. A source line layer(465a) and a drain line layer(465b) touch the source electrode layer and the drain electrode layer, respectively. |
申请公布号 |
KR20130032838(A) |
申请公布日期 |
2013.04.02 |
申请号 |
KR20120105175 |
申请日期 |
2012.09.21 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
SAITO TOSHIHIKO;ISOBE ATSUO;HANAOKA KAZUYA;NAGAMATSU SHO |
分类号 |
H01L29/786;H01L21/336 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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