发明名称 |
p-Type MgZnO-based thin film and semiconductor light emitting device |
摘要 |
A p-type MgxZn1-xO-based thin film (1) is formed on a substrate (2) made of a ZnO-based semiconductor. The p-type MgxZn1-xO-based thin film (1) is composed so that X as a ratio of Mg with respect to Zn therein can be 0≦̸X<1, preferably 0≦̸X≦̸0.5. In the p-type MgZnO thin film (1), nitrogen as p-type impurities which become an acceptor is contained at a concentration of approximately 5.0×1018 cm−3 or more. The p-type MgZnO thin film (1) is composed so that n-type impurities made of a group IV element such as silicon that becomes a donor can have a concentration of approximately 1.0×1017 cm−3 or less. The p-type MgZnO thin film (1) is composed so that n-type impurities made of a group III element such as boron and aluminum which become a donor can have a concentration of approximately 1.0×1016 cm−3 or less. |
申请公布号 |
US8410478(B2) |
申请公布日期 |
2013.04.02 |
申请号 |
US20080672444 |
申请日期 |
2008.08.01 |
申请人 |
NAKAHARA KEN;YUJI HIROYUKI;TAMURA KENTARO;AKASAKA SHUNSUKE;KAWASAKI MASASHI;OHTOMO AKIRA;TSUKAZAKI ATSUSHI;ROHM CO., LTD. |
发明人 |
NAKAHARA KEN;YUJI HIROYUKI;TAMURA KENTARO;AKASAKA SHUNSUKE;KAWASAKI MASASHI;OHTOMO AKIRA;TSUKAZAKI ATSUSHI |
分类号 |
H01L29/12;H01L33/16;H01L33/28 |
主分类号 |
H01L29/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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