发明名称 Interconnect structure device
摘要 According to one embodiment, a device includes an insulating layer with a first trench, a first interconnect layer in the first trench, the first interconnect layer including copper and includes a concave portion, and a first graphene sheet on an inner surface of the concave portion.
申请公布号 US8410608(B2) 申请公布日期 2013.04.02
申请号 US201113233312 申请日期 2011.09.15
申请人 WADA MAKOTO;YAMAZAKI YUICHI;KABUSHIKI KAISHA TOSHIBA 发明人 WADA MAKOTO;YAMAZAKI YUICHI
分类号 H01L23/48 主分类号 H01L23/48
代理机构 代理人
主权项
地址