| 摘要 |
PURPOSE: A handler for a wafer back grind apparatus is provided to protect a wafer from foreign substances by easily cleaning the handler. CONSTITUTION: A wafer handler(200) includes a circular plate body(210), a plurality of support pins(220) vertically formed in a body and a vacuum hole(230) formed by vertically penetrating a body. The body is made of ceramic or aluminum. The support pin is vertically formed in one surface of the body. The support pin is made of the same material with the body. The vacuum hole chucks or unchucks a wafer on the support pin through a vacuum suction apparatus such as arm installed in the other surface of the body. |
