| 摘要 |
PURPOSE: A probe inspection apparatus using an air bearing is provided to have a structure not only minimizing an error when contacting by sliding moving a probe pin without any frictional force but also minimizing pressure when contacting by vertically moving a probe pin via air-bushing. CONSTITUTION: A probe inspection apparatus using an air bearing includes a fixing member(20) installed in a front mount base of a driving unit, a bushing installation hole(32) installed in a front face of the fixing member, a bushing installation block(30) in which a connection hole(34) is installed in one side thereof, an air inflow feeding(38) supplying air to an air bushing(36), a shaft(40) vertically installed after penetrating the air bushing, an upper member(22) installed in the upper end of the fixing member, a first movable member(50) having a U-shaped side and moving in the upward and downward direction according to a vertical movement of a shaft through the air bushing, a second movable member(60) having an L-shaped side, being installed in a front side of a first engagement member and linking in the upward and downward direction, a contact sensor(70) vertically penetrating the other end of a sensor installation block installed in the fixing member(20) and being installed, a sensor detection block(62) installed in the second movable member(60) corresponding to the upper side of the contact sensor and separating from the contact sensor when the second movable member elevates and generating a sensing signal, a contact pin(90) installed in the lower end of the second movable member via contact pin installation member and selectively contacting with a glass and a compression spring(80) applying a resilient force toward the lower side when the first and the second movable members(50,60) elevate. |
