| 摘要 |
<p>PURPOSE: A metal nanoparticle ultra-narrow laser sintering apparatus and a method thereof are provided to use a femtosecond laser as a light source to make the size and precision of a metal pattern on a nano scale. CONSTITUTION: A method of metal nanoparticle ultra-narrow laser sintering is composed of the following steps. The first step is to coat evenly a metal nanoparticle(40) on a substrate(50). The second step is to sinter metal nanoparticle by irradiating the metal nanoparticles with an ultra short pulse laser(11). The ultra short pulse laser is the femtosecond laser. The substrate is composed of one among a pane of glass, a silicon wafer and an organic layer type film. The metal particle is made of one among Au, Ag, Cu, and Al.</p> |
