Method for estimating length of metal species diffused between metal lines hidden within in three-dimensional integrated structure, involves measuring resistance between portions, where resistance value provides estimated diffusion length

摘要

The method involves diffusing metal species in metal lines (LM1, LM2), and placing a measuring equipment in electrical contact with two portions in the metal lines, respectively by two connection units. The resistance value between the portions is measured, and provides estimated diffusion length. A conducting layer (CC) is formed at bottom and on walls of cavities (CV1, CV2) forming another electrical contact with the portions. The measuring equipment is in direct or indirect contact with the portions by two points of probes. An independent claim is also included for a three-dimensional integrated structure.