METHOD OF MAKING A LOW-RESISTIVITY, DOPED ZINC OXIDE COATED GLASS ARTICLE AND THE COATED GLASS ARTICLE MADE THEREBY

摘要

WHAT IS DESCRIBED AND CLAIMED IS AN ATMOSPHERIC CHEMICAL VAPOR DEPOSITION METHOD OF MAKING A LOW-RESISTIVITY, DOPED ZINC OXIDE COATED GLASS ARTICLE, MADE BY DIRECTING ONE OR MORE STREAMS OF GASEOUS REACTANTS, SPECIFICALLY A ZINC CONTAINING COMPOUND, A FLUORINE CONTAINING COMPOUND, AN OXYGEN CONTAINING COMPOUND, AND AT LEAST ONE COMPOUND CONTAINING ONE OR MORE OF BORON, ALUMINUM, GALLIUM AND INDIUM ONTO A SURFACE OF A HEATED GLASS SUBSTRATE.