AIR-HOLE STRUCTURE AND AIR-HOLE UNIT FOR SUBSTRATE FLOATING STAGE, AND SUBSTRATE FLOATING STAGE AND SUBSTRATE FLOATING APPARATUS HAVING THE SAME

摘要

PURPOSE: An air-hole structure and an air-hole unit for a substrate floating stage, and the substrate floating stage and a substrate floating apparatus having the same are provided to constantly maintain the floating height of a substrate. CONSTITUTION: A substrate floating stage(276) comprises an upper plate(276a), a lower plate(276b), air holes(288), and an air supply manifold(256). An air supply unit(252) provides air to the air holes through the air supply manifold. An air supply channel(254) connects the air supply manifold to the air supply unit.