发明名称 |
EXPOSURE APPARATUS HAVING BLIND AND METHOD OF DRIVING |
摘要 |
An exposure apparatus includes a light source, a mask, a blind, and a blind driver. The light source emits light in a light emitting cycle. The mask is disposed over a substrate and includes an exposure window. A pattern is formed in the exposure window. The blind is disposed over the exposure window. The blind moves in a first direction to block a non-exposed area in the substrate. The blind is returned to pass through the exposure window area in a second direction opposite to the first direction. The blind includes a plurality of blocking plates. The blocking plates include a blocking portion and an opening portion. The blind driver drives the blind. |
申请公布号 |
US2013077067(A1) |
申请公布日期 |
2013.03.28 |
申请号 |
US201213477992 |
申请日期 |
2012.05.22 |
申请人 |
KIM CHANG-HOON;YOO HONG-SUK;SAMSUNG DISPLAY CO., LTD. |
发明人 |
KIM CHANG-HOON;YOO HONG-SUK |
分类号 |
G03B27/42 |
主分类号 |
G03B27/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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