HEAT RETENTION BARREL AND VERTICAL HEAT TREATMENT APPARATUS PROVIDED WITH HEAT RETENTION BARREL

摘要

The invention provides a heat retention barrel and a vertical heat treatment apparatus provided with the heat retention barrel. The heat retention barrel is used for supporting the wafer boat and comprises a barrel body and a barrel base. The external rim of the bottom of the barrel body is located within the upper surface of the barrel base. The pollution of the particles in the heat retention barrel to the reaction chamber of the vertical heat treatment apparatus can be eliminated through the portion of the upper surface of the barrel base outside the external rim. The selection of the materials for the heat retention barrel can increase the heat retention and heat insulation effects as well as the use safety.