发明名称 |
SYSTEMS AND METHODS FOR PROVIDING MIRRORS WITH HIGH STIFFNESS AND LOW INERTIA INVOLVING CHEMICAL ETCHING |
摘要 |
A method is disclosed of fabricating a mirror for use in limited rotation motor systems, said method comprising the steps of providing a mirror structure including at least one wall section, and exposing the at least one wall section to a fluid etching agent to thereby provide chemical milling of the mirror structure. |
申请公布号 |
WO2013019607(A3) |
申请公布日期 |
2013.03.28 |
申请号 |
WO2012US48513 |
申请日期 |
2012.07.27 |
申请人 |
GSI GROUP CORPORATION;BROWN, DAVID, C. |
发明人 |
BROWN, DAVID, C. |
分类号 |
G02B26/08 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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