发明名称 LED LIGHT SOURCE APPARATUS AND EXPOSURE APPARATUS
摘要 This light source apparatus is applicable to apparatuses, such as exposure apparatuses, which need high light intensity. The light source apparatus is provided with: an LED unit, which has a plurality of LEDs and a bar-shaped supporting member wherein the LEDs are disposed on the side surface in the axis direction; and a plurality of reflectors, which respectively have reflecting surfaces that guide light from corresponding LEDs to the axis direction, and are individually attached to the LED unit. Each of the reflectors has attaching position thereof adjusted such that a focal point position of each of the reflecting surfaces matches the light emitting position of each of the corresponding LEDs.
申请公布号 WO2013042710(A1) 申请公布日期 2013.03.28
申请号 WO2012JP74013 申请日期 2012.09.20
申请人 ORC MANUFACTURING CO., LTD. 发明人 SERIZAWA IZUMI
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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