ACTIVELY COMPENSATED STAGE HAVING 5-DOF MOTION ERROR COMPENSATION AND MOTION ERROR COMPENSATING METHOD THEREOF
摘要
<p>Disclosed are an actively compensated stage including: a guide support having first and second guide surfaces perpendicular to each other; a table having first and second sides opposite the first and second guide surfaces and having air bearings on the first and second sides; a driving linear motor moving the table straight in an x-axial direction; and a plurality of magnetic actuators applying a magnetic preload between the guide support and the table and changing a magnetic force between the guide support and the table to compensate for 5-DOF motion errors generated in the table.</p>
申请公布号
WO2012165872(A3)
申请公布日期
2013.03.28
申请号
WO2012KR04291
申请日期
2012.05.31
申请人
KOREA INSTITUTE OF MACHINERY & MATERIALS;RO, SEUNG KOOK;PARK, JONG KWEON;KIM, BYUNG SUB;LEE, SUNG CHEUL
发明人
RO, SEUNG KOOK;PARK, JONG KWEON;KIM, BYUNG SUB;LEE, SUNG CHEUL