摘要 |
PURPOSE: A negative electrode for lithium ion secondary battery, a manufacturing method thereof and a lithium-ion secondary battery adopting the same are provided to simplify manufacturing process and to improve charging and discharging properties. CONSTITUTION: A manufacturing method of lithium ion secondary battery having an amorphous silicon oxide thin film includes a step of forming a SiOx thin film. Here, 0.3 <= x <= 1.5. The thin film of the amorphous silicon oxide contains a mixture of Si and one selected from SiO2. The amorphous silicon oxide thin film is manufactured by deposition. The thin film forming step is processed at 20-600 deg. Celsius under argon or oxygen condition. |