发明名称 LATERAL DOUBLE DIFFUSED METAL OXIDE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 Disclosed are an LDMOS device and a method for manufacturing the same capable of decreasing the concentration of a drift region between a source finger tip and a drain, thereby increasing a breakdown voltage. An LDMOS device includes a gate which is formed on a substrate, a source and a drain which are separately arranged on both sides of the substrate with the gate interposed therebetween, a field oxide film which is formed to have a step between the gate and the drain, a drift region which is formed of first condition type impurity ions between the gate and the drain on the substrate, and at least one internal field ring which is formed inside the drift region and formed by selectively ion-implanting second conduction type impurity ions in accordance with the step of the field oxide film.
申请公布号 US2013075816(A1) 申请公布日期 2013.03.28
申请号 US201213410905 申请日期 2012.03.02
申请人 YOO JAE HYUN;KIM JONG MIN;DONGBU HITEK CO., LTD. 发明人 YOO JAE HYUN;KIM JONG MIN
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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