发明名称 |
COOLANT REGENERATION METHOD |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coolant regeneration method capable of regenerating a coolant in a high yield while having a function to remove sludge adhered to a rotating body. <P>SOLUTION: The coolant regeneration method 1 includes: a detergent discharge step S0' of discharging a detergent to a vertical centrifugation device; a sludge washing step S0" of rotating a rotating body of the vertical centrifugation device from which the detergent is discharged at a speed lower than a rotating speed in centrifugation step to wash and remove sludge adhered to the vertical centrifugation device; a coolant supply step S1 of supplying a used coolant to a centrifugation unit including the vertical centrifugation device; a centrifugation step S2 of centrifugally separating the used coolant supplied to the centrifugation unit into a solid content containing silicon chips and a centrifugation liquid; and an intermittent control step S3 of intermittently controlling the supply of the used coolant with the vertical centrifugation device of the centrifugation unit being operated. <P>COPYRIGHT: (C)2013,JPO&INPIT |
申请公布号 |
JP2013056381(A) |
申请公布日期 |
2013.03.28 |
申请号 |
JP20110194822 |
申请日期 |
2011.09.07 |
申请人 |
G-FORCE JAPAN KK;KURARAY CO LTD |
发明人 |
BONO SHIGEKI;NISHIDA KOJI;OGITA DAI;YAMADA KOJI;NISHI TAKEO |
分类号 |
B24B57/00;B28D7/02;H01L21/304 |
主分类号 |
B24B57/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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