| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve a detection level, regarding an angular velocity sensor used for various electronic devices, and an angular velocity sensor element used for the sensor. <P>SOLUTION: In an angular velocity sensor composed of driving arms 11 each of which is connected at one end to a fixed part 9 and at the other end to a spindle part 10, a shape of the driving arm 11 is formed to be a fold-back structure of arm sides 11a and 11b which extend in a direction intersecting perpendicularly a direction connecting the fixed part 9 and the spindle part 10. <P>COPYRIGHT: (C)2013,JPO&INPIT |
