发明名称 MANUFACTURING METHOD FOR THIN FILM TRANSISTOR AND THIN FILM TRANSISTOR MANUFACTURED BY THEM
摘要 Provided are a manufacturing method for a thin film transistor, and a thin film transistor manufactured by the manufacturing method. In the manufacturing method, a semiconductor layer and an insulating layer for stopping etching, which are sequentially stacked, are etched by dry etching and wet etching using a single photoresist pattern, and patterning the semiconductor layer and the insulating layer into a channel layer and an etch stop layer, respectively, thereby simplifying the manufacturing process of the thin film transistor.
申请公布号 US2013075731(A1) 申请公布日期 2013.03.28
申请号 US201113311698 申请日期 2011.12.06
申请人 HAN MIN KOO;KIM SUN JAE;SNU R&DB FOUNDATION 发明人 HAN MIN KOO;KIM SUN JAE
分类号 H01L21/336;H01L29/04;H01L29/786 主分类号 H01L21/336
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