EXHAUST PIPE OF VACUUM PUMP FOR CHEMICAL VAPOR DEPOSITION MACHINE STATION AND CORRESPONDING VACUUM PUMP

摘要

An exhaust pipe of a vacuum pump for a chemical vapor deposition machine station and a corresponding vacuum pump. The two ends of the exhaust pipe of the vacuum pump are connected with the outlet end of the vacuum pump and a waste gas treatment machine respectively. An anti-adhesion lining pipe clinging to the inner wall of the exhaust pipe is arranged in the exhaust pipe. The exhaust pipe of the vacuum pump and the corresponding vacuum pump do not incur clogging to the exhaust pipe easily, thereby solving the problems of wasted labor and time and affected availability of the chemical vapor deposition machine station due to cleaning of the exhaust pipe incurred by easy clogging of the existing exhaust pipe.