| 摘要 |
A cryogenic refrigerator includes a cylinder, a displacer configured to be moved back and forth in the cylinder by a drive unit, an inlet valve configured to be opened in supplying a refrigerant gas into the cylinder, an exhaust valve configured to be opened in exhausting the refrigerant gas from the cylinder, and an expansion space formed in the cylinder and configured to generate a cooling by expanding the refrigerant gas caused by back and forth movement of the displacer. A moving speed of the displacer in the vicinity of a bottom dead center is set to be faster than the moving speed of the displacer in the vicinity of a top dead center.
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