发明名称 |
Method and Device for Thermal Insulation of Micro-Reactors |
摘要 |
A micro-fluidic device is described. The micro-fluidic device includes a semiconductor substrate; at least one micro-reactor in the semiconductor substrate; one or more micro-fluidic channels in the semiconductor substrate, connected to the at least one micro-reactor; a cover layer bonded to the semiconductor substrate for sealing the one or more micro-fluidic channels; and at least one through-substrate trench surrounding the at least one micro-reactor and the one or more micro-fluidic channels.
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申请公布号 |
US2013078155(A1) |
申请公布日期 |
2013.03.28 |
申请号 |
US201213625247 |
申请日期 |
2012.09.24 |
申请人 |
IMEC;KATHOLIEKE UNIVERSITEIT LEUVEN, K.U LEUVEN R&D;PANASONIC;IMEC;PANASONIC;KATHOLIEKE UNIVERSITEIT LEUVEN, K.U. LEUVEN R&D |
发明人 |
JONES BEN;FIORINI PAOLO;TANAKA HIROYUKI |
分类号 |
B01J19/24;B32B37/14;B32B38/14 |
主分类号 |
B01J19/24 |
代理机构 |
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代理人 |
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地址 |
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