NONCONTACT CONVEYING APPARATUS

摘要

PURPOSE: A noncontact transfer device is provided to reduce a substrate from shaking in a transfer process by spraying compressed air of high pressure with a low flow rate. CONSTITUTION: A transfer plate includes a top plate(110) with a plurality of air holes(111) with tapped areas and a bottom plate(130) arranged on the lower side of the top plate. A transfer plate transfers an object without a contact based on compressed air of high pressure through the plurality of air holes. A resistance module is partially combined with the air hole and sprays the compressed air of the high pressure to the upper side of the top plate with a low flow rate. A resistance path is formed between an inner wall of the air hole and the resistance module. [Reference numerals] (AA) Substrate