发明名称 Gettervorrichtung
摘要 984,893. Discharge apparatus. GENERAL ELECTRIC CO. May 14, 1962 [May 15, 1961], No. 18419/62. Heading H1D. Apparatus for removing organic gases from a partially evacuated environment comprises dissociator means for converting the organic gases into their molecular, parti-molecular and atomic constituents and pump for eliminating the constituents. The organic gases may be methane, ethane, flurene or high molecular weight hydrocarbons. They may be decomposed by heat and/or by a chemical catalyst and/or by ionization. Heating is by filaments 27, Fig. 2, of tungsten or rhenium which may be coated with aluminium oxide or by a porous mass of beryllium oxide or aluminium oxide, Fig. 3 (not shown), heated by a heater. The chemical catalyst may be activated alumina, silica, magnesium oxide, carbon, aluminium silicate, platinum or palladium. Ionization is by a directly heated cathode 36 and anode 38. Carbon 40 deposits on the walls of the container and serves as a getter for carbon monoxide and carbon dioxide and for the other organic gas molecule constituents. The chamber has therein or adjacent thereto surfaces of areas of reduced temperature to preferentially receive the carbon deposits and to inhibit desorption. This effect may be produced by artificial cooling or by spacing the surfaces or areas further from the heating elements. Oxygen containing compounds of barium, calcium or strontium are reduced to the metal oxide by the heat and oxidize the constituents of the organic gases, and after reduction to the metal exert a further gettering action on the organic gas constituents. There may be a preliminary molecular filtration means, Fig. 4 (not shown), comprising zeolite, actuated alumina, or charcoal. The preliminary means may be provided with cooling means, e.g. one or more peltier junctions. A vacuum ion pump of the hot or cold cathode variety or a diffusion pump may be used. The pump may contain a heated member of titanium to absorb hydrogen. The premolecular sieve and heating compartment may be an appendage to or integral with the inlet to the vacuum pump.
申请公布号 DE1464612(A1) 申请公布日期 1969.01.23
申请号 DE19621464612 申请日期 1962.05.14
申请人 GENERAL ELECTRIC COMPANY 发明人 PAUL COPPOLA,PATRICK
分类号 H01J7/18;H01J9/38;H01J41/16 主分类号 H01J7/18
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