发明名称 INVERSE-DEEPING DEVICE AND SURFACE TREATMENT METHOD USING THE DEVICE
摘要 PURPOSE: An inverse deeping device and a surface treatment method of a sample using the same are provided to simplify processes and reduce cost using PDMS(polydimethylsiloxane). CONSTITUTION: An inverse deeping device comprises a bathtub unit(110), an inverse deeping unit(120), and a control unit(130). The bathtub unit accommodates an electrolyte(200). A sample is able to be mounted for physical contact with the electrolyte in the inverse deeping unit. The inverse deeping unit vertically controls the position of the sample. The control unit senses the contact of the electrolyte and the sample and controls the position of the sample to begin and finish an etching work or an evaporating work of the sample.
申请公布号 KR20130030856(A) 申请公布日期 2013.03.28
申请号 KR20110094402 申请日期 2011.09.20
申请人 INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY ERICA CAMPUS 发明人 YOO, BONG YOUNG;KIM, DONG UK;JIN, SANG HYUN
分类号 G01N1/32;G01N27/26 主分类号 G01N1/32
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