发明名称 TRANSFER ROBOT AND SUBSTRATE PROCESSING APPARATUS
摘要 A transfer robot includes an arm unit having a hand capable of holding one of transferred objects, a base unit mounted to an installation frame and horizontally rotatably supporting the arm unit, an attachment member for attaching the base unit to the installation frame, and an elevation mechanism arranged within the base unit and provided with an elevation member linked to the arm unit. The elevation mechanism is configured to move the arm unit up and down within an arm-unit up/down movement range defined above the base unit by moving the elevation member up and down along a vertical shaft. The base unit is fixed to the installation frame in a state that a portion of the base unit extending by a specified height from a bottom wall of the base unit to the attachment member is embedded in the base receiving recess of the installation frame.
申请公布号 US2013078060(A1) 申请公布日期 2013.03.28
申请号 US201213568622 申请日期 2012.08.07
申请人 FURUICHI MASATOSHI 发明人 FURUICHI MASATOSHI
分类号 H01L21/683 主分类号 H01L21/683
代理机构 代理人
主权项
地址
您可能感兴趣的专利