| 摘要 |
Disclosed is a vacuum pump exhaust pipe of a chemical vapor deposition apparatus, wherein two ports of the vacuum pump exhaust pipe are respectively connected to a vacuum pump outlet and a scrubber, and anti-sticking inner pipes are installed inside the exhaust pipe and closely contacted with inner walls of the exhaust pipe. The present invention also relates to a vacuum pump of the chemical vapor deposition apparatus. Blockage hardly occurs in the vacuum pump exhaust pipe of the chemical vapor deposition apparatus and the relevant vacuum pump according to the present invention to solve problems of the easily found blockage in the exhaust pipe, wasting the manpower and the time for clearing the exhaust pipe and the effect to the uptime of the chemical vapor deposition apparatus in the prior arts.
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