APPARATUS FOR ACQUIRING ION SOURCE OF MASS SPECTROMETRY USING UV LED AND CEM

摘要

PURPOSE: An ionization source securing device of a mass spectrometer using a UV diode and a CEM is provided to secure the bulk of amplified electron beams by inducing the discharging of initial electrons through irradiating UV photons to the entrance of a CEM module. CONSTITUTION: An UV diode(110) emits an ultraviolet ray. A CEM(Channeltron Electron Multiplier) module(120) induces and amplifies the discharging of initial electrons and secures the bulk of electron beams at an exit(122). An electron integrating lens integrates an amplified electronic beam. An ion trap mass separator ionizes gas sample molecules with an injected electron beam. An ion detector detects an ion separated from an ion trap mass separator with a mass spectrum. The CEM module respectively applies negative voltage to a CEM module entrance(121) and a CEM module exit. The CEM module insulates using first and second insulators(123,124).