摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high temperature substrate having ultra-low gas and liquid permeation, scratch resistance, and chemical resistance, which can be used as a support for display devices. <P>SOLUTION: This high temperature substrate includes: a polymer substrate 105 having a glass transition temperature greater than 120°C; a first barrier stack 115 including a first barrier layer 120 on the polymer substrate and a first polymer layer 125 on the first barrier layer; an environmentally sensitive display device placed on the first barrier stack; a second barrier stack including a second barrier layer on the environmentally sensitive display device and a second polymer layer on the second barrier layer; and a polymer smoothing layer 110 between the polymer substrate and the first barrier stack; and a lid placed on the second barrier stack. The first barrier layer is vapor deposited. The first polymer layer is a vacuum vapor deposited acrylate-containing polymer layer. An oxygen permeation rate through the first barrier stack is low. <P>COPYRIGHT: (C)2013,JPO&INPIT |