| 摘要 |
<P>PROBLEM TO BE SOLVED: To measure a two-dimensional distribution of magnetic field formed by each of magnetic head elements formed on a row bar of a magnetic head, without being affected by the external environment. <P>SOLUTION: The magnetic head element inspection apparatus inspects the effective track width of a write track of each of magnetic heads of a row bar including a large number of the magnetic heads formed thereon. The magnetic head element inspection apparatus comprises: an anti-vibration table part for preventing vibrations from being transmitted from the outside, on which a tray part, a stage part, a sample receiving and delivering part, a magnetic field measurement part and an effective track width measurement part are placed; and an anti-noise part which covers the tray part, the stage part, the sample receiving and delivering part, the magnetic field measurement part, the effective track width measurement part and the anti-vibration table part to prevent noises from being transmitted from the outside. <P>COPYRIGHT: (C)2013,JPO&INPIT |
