| 摘要 |
A capacitive accelerometer includes a substrate and a first semiconductor layer. The first semiconductor layer is disposed on the substrate and includes a first mass, first and second support bases, first and second elastic members, and first and second comb capacitor sets. The first and second support bases are disposed at positions corresponding to first and second axes respectively. The first elastic member is connected to the first mass and the first support base in a manner of bending back and forth perpendicular to the first axis. The second elastic member is connected to the first mass and the second support base in a manner of bending back and forth perpendicular to the second axis. The first and second comb capacitor sets are disposed at positions corresponding to the second and first axes respectively and connected to the first mass. The first axis is perpendicular to the second axis.
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