发明名称 DOUBLE GATE TRANSISTOR AND METHOD OF FABRICATING THE SAME
摘要 The present invention discloses a double gate transistor and a method of fabricating said transistor, said transistor comprising: a semiconductor layer on a substrate; a fin structure formed in said semiconductor layer, said fin structure having two end portions for forming source and drain regions and a middle portion between said two end portions for forming a channel region, said middle portion including two opposed side surfaces perpendicular to a substrate surface; a first gate dielectric layer and a first gate disposed on one side surface of said middle portion; and a second gate dielectric layer and a second gate disposed on the other side surface of said middle portion.
申请公布号 US2013075811(A1) 申请公布日期 2013.03.28
申请号 US201113324945 申请日期 2011.12.13
申请人 WANG XINPENG;ZHANG HAIYANG;SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION 发明人 WANG XINPENG;ZHANG HAIYANG
分类号 H01L29/78;H01L21/283 主分类号 H01L29/78
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