STRUCTURE AND METHOD FOR REDUCING VERTICAL CRACK PROPAGATION

摘要

A device comprising an insulator and layers on the insulator. Each of the layers includes a first metal conductor and a second metal conductor positioned proximate the first metal conductor. The first metal conductors include a first vertically stacked structure, and the second metal conductors include a second vertically stacked structure. At least one air gap is positioned between the first vertically stacked structure and the second vertically stacked structure. The gap may include a metal fill.