| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a low speed scanning electron microscope which can detect a reflection electron and a secondary electron even of a low probe current while discriminating. <P>SOLUTION: The scanning electron microscope comprises an electron gun 29, an aperture 26, a sample table 3, an electron optics system 4-1 for focusing an electron beam 31 onto a sample 2, deflection means 10, a secondary electron detector 8, a reflection electron detector 9, and cylindrical electron transport means 5 interposed between the electron gun 29 and the sample 2. The reflection electron detector 9 is disposed in the electron transport means 5 on the side remoter from the electron gun 29 than the secondary electron detector 8 and the deflection means 10, and the sensitive surface 9-1 of the reflection electron detector 9 is wired electrically so as to have the same potential as that of the electron transport means 5. <P>COPYRIGHT: (C)2013,JPO&INPIT |
