INCIDENT CAPACITIVE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a capacitive sensor device for measuring radiation.

SOLUTION: The device includes two sensor regions and a top plate structure. The sensor regions are made of a material that generates electron-hole pairs when radiation strikes the material. A separation region is located between the two sensor regions. The capacitance between a sensor region and the top plate is dependent upon radiation striking the sensor region. A blocking structure selectively and differentially blocks radiation having a parameter value in some range from the sensor region so as to differentially impact electron-hole pair generation in one sensor region with respect to electron-hole pair generation in the other sensor region at selected angles of incidence of the radiation.

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