| 摘要 |
<p>Certain embodiments provided a coating apparatus (10) comprising an applicator (50), material supply unit (80), and first, second, and third moving mechanisms (40, 60, 70, 150). The applicator (50) includes a meniscus pillar forming portion (57) configured to form a meniscus pillar of the material in conjunction with a surface (21) to be coated of the object (20) to be coated and a recess (52, 55) recessed relative to the surroundings thereof. The material supply unit (80) supplies the material (M) to the applicator (50). The first moving mechanism (40) moves the position (50) of the applicator relative to the surface (21) along the surface (21). The second moving mechanism (70, 150) moves the position of the applicator (50) relative to the surface (21) so that the meniscus pillar between the surface and the recess (52, 55). The third moving mechanism (60) moves the position of the applicator (50) relatively toward and away from the surface (21).</p> |
