THE CATHODE UNIT FOR REGULAR PARTICLE ROLL TO ROLL COATING

摘要

PURPOSE: A cathode device for regular particle roll to roll coating is provided to maintain a gap between the bottom of erosion and the top of a magnet, and to continuously apply the same electric field to the same magnetic field. CONSTITUTION: A cathode device for regular particle roll to roll coating forms multiple magnets(70) under a target(100). The multiple magnets are vertically moved by a vertical moving plate in order to control a distance between the multiple magnets and the target. The N and S poles of the magnets are alternately arranged. The sizes of the magnets are the same. Erosion(10) is formed on a part of the target that is intensively sputtered. [Reference numerals] (AA) Bottom of erosion; (BB) Gap; (CC) Top of magnets