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经营范围
发明名称
SUBSTRATE STORAGE CONTAINER AND METHOD OF PRODUCING THE SAME
摘要
申请公布号
EP1883105(B8)
申请公布日期
2013.03.27
申请号
EP20060732201
申请日期
2006.04.21
申请人
SHIN-ETSU POLYMER CO., LTD.
发明人
HOSOI, MASATO
分类号
H01L21/673;B65D85/86
主分类号
H01L21/673
代理机构
代理人
主权项
地址
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