| 摘要 |
The invention includes: a base; a table supported by the base; a tubular rod 41 connected to a side of the table via a joint 6; a drive mechanism that moves the rod 41 forward and backward; and a laser interferometer that detects displacement of the table relative to the base. The joint 6 is provided by a supplying-discharging static-pressure joint and includes: a movement surface 63 that is connected to the table 31 and is orthogonal to a moving direction of the table 31; a drive surface 64 that is connected to the rod 41 and faces the movement surface 63; and a fluid supply channel 66 supplying fluid to a static-pressure clearance 65 between the movement surface 63 and the drive surface 64. The laser interferometer includes a laser path 56 having an optical axis along the moving direction passing through the inside of the rod 41 of which a pressure is reduced and the drive surface 64 and reflect on the movement surface 63. |
