Pressure measurement cell

摘要

#CMT# #/CMT# The pressure measuring cell (1) has a base portion (2) which includes base electrode. A membrane portion (3) is connected to base portion to form a sensor chamber that includes membrane electrode (6) and is subjected to the pressure of medium below the measurement pressure. The cell is provided with two walls in which one wall is located within the interior of the sensor chamber (10) and another wall is formed by the membrane portion. The walls are covered with a protective layer that is fashioned as a glass layer (7). #CMT# : #/CMT# An independent claim is included for method of measuring metered pressure. #CMT#USE : #/CMT# Pressure measuring cell used as ceramic capacitive pressure sensor for measuring metered pressure. #CMT#ADVANTAGE : #/CMT# Since the protective layer is provided in pressure measuring cell, the negative electrical effects from buildup of water molecules can be avoided and the manufacturing of cell can be simple with low cost. The electrodes from rubbing against each other is prevented in overload situation, hence the loosening of particles from the electrodes can be prevented. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a schematic cross sectional view of pressure measuring cell. 1 : Pressure measuring cell 2 : Base portion 3 : Membrane portion 6 : Membrane electrode 7 : Glass layer 10 : Sensor chamber.